Fabrication of antireflection nanostructures by hybrid nano-patterning lithography

Kang, Young Hun, Oh, Sang Soon ORCID: https://orcid.org/0000-0003-3093-7016, Kim, Young-Sung and Choi, Choon-Gi 2010. Fabrication of antireflection nanostructures by hybrid nano-patterning lithography. Microelectronic Engineering 87 (2) , pp. 125-128. 10.1016/j.mee.2009.06.006

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Publisher:	Elsevier
ISSN:	0167-9317
Date of First Compliant Deposit:	19 December 2017
Last Modified:	03 Nov 2022 10:19
URI:	https://orca.cardiff.ac.uk/id/eprint/107670

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