Novel technologies for the realisation of GaAs pHEMTs with 120 nm self-aligned and nanoimprinted T-gates

Moran, D., Boyd, E., McLelland, H., Elgaid, Khaled ORCID: https://orcid.org/0000-0003-3265-1097, Macintyre, D.S., Thoms, S., Stanley, C.R. and Thayne, I.G. 2003. Novel technologies for the realisation of GaAs pHEMTs with 120 nm self-aligned and nanoimprinted T-gates. Microelectronic Engineering 67-68 , pp. 769-774. 10.1016/S0167-9317(03)00137-0

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Publisher:	Elsevier
ISSN:	0167-9317
Last Modified:	23 Oct 2022 13:03
URI:	https://orca.cardiff.ac.uk/id/eprint/109545

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