Understanding the limitations of the Super-X energy dispersive x-ray spectrometer as a function of specimen tilt angle for tomographic data acquisition in the S/TEM

Slater, T. J. A. ORCID: https://orcid.org/0000-0003-0372-1551, Camargo, P. H. C., Burke, M. G., Zaluzec, N. J. and Haigh, S. J. 2014. Understanding the limitations of the Super-X energy dispersive x-ray spectrometer as a function of specimen tilt angle for tomographic data acquisition in the S/TEM. Journal of Physics: Conference Series 522 , 012025. 10.1088/1742-6596/522/1/012025

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Abstract

We have investigated the use of x-ray energy dispersive spectroscopy during tomographic hyperspectral imaging experiments in the scanning transmission electron microscope. In this work, we have found that for an analytical system employing a commercial high-tilt tomography holder the measured x-ray signal is limited by shadowing caused by the penumbra of the holder relative to the x-ray detector system. This limits the ability to perform quantitative, elemental tomographic analysis.

Item Type:	Article
Date Type:	Published Online
Status:	Published
Schools:	Chemistry Cardiff Catalysis Institute (CCI)
Additional Information:	Electron Microscopy and Analysis Group Conference 2013 (EMAG2013) 3–6 September 2013, York, United Kingdom Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publisher:	IOP Publishing
ISSN:	1742-6588
Date of First Compliant Deposit:	30 March 2022
Last Modified:	14 May 2023 20:29
URI:	https://orca.cardiff.ac.uk/id/eprint/148238

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