A review of Failure Mode and Effects Analysis (FMEA) for sustainable manufacturing and improvement in electrostatic chuck manufacture and operation

James, Steffan and Rowlands, Hefin 2023. A review of Failure Mode and Effects Analysis (FMEA) for sustainable manufacturing and improvement in electrostatic chuck manufacture and operation. Presented at: International Conference on Sustainable Design and Manufacturing, Split, Croatia, 14-16 September 2022. Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022). , vol.338 Springer, 159–167. 10.1007/978-981-19-9205-6_15

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Abstract

Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

Item Type:	Conference or Workshop Item (Paper)
Date Type:	Publication
Status:	Published
Schools:	Business (Including Economics)
Publisher:	Springer
ISBN:	9789811992049
Last Modified:	22 Jan 2024 11:15
URI:	https://orca.cardiff.ac.uk/id/eprint/165462

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