Hirshy, Hassan ORCID: https://orcid.org/0000-0003-0281-3681, Scholz, Steffen G., Jourlin, Y., Tonchev, S., Reynaud, S., Boukenter, A. and Parriaux, O. 2014. 2N Period submicron grating at the inner wall of a metal cylinder. Microsystem Technologies 20 (10-11) , pp. 1833-1837. 10.1007/s00542-013-1949-y |
Official URL: http://dx.doi.org/10.1007/s00542-013-1949-y
Abstract
The aim of the present contribution is to set up and demonstrate the chain of processes leading to the Ni-master of a circular cylinder having an integer number of long grating lines of submicron period at its wall. Microelectronics 2D microstructuring technologies were adapted in order to print a photoresist integer period number on a glass cylinder flank by the projection of a radial planar phase-mask grating. The next step is the galvanic growth of nickel on the photoresist corrugation. Subsequently, the manufacturing of cylindrical gratings will be enabled by an injection moulding process.
Item Type: | Article |
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Date Type: | Publication |
Status: | Published |
Schools: | Engineering |
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
Additional Information: | Online publication date: 1 November 2013. |
Publisher: | Springer |
ISSN: | 0946-7076 |
Last Modified: | 25 Oct 2022 09:03 |
URI: | https://orca.cardiff.ac.uk/id/eprint/57061 |
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