Nanotechnology fabrication of polysilicon film/metal grid infrared filters

Hicks, Brian C., Rebbert, Milt, Isaacson, Pete, Ma, David, Marrian, Christie, Fischer, Jackie, Smith, Howard A., Ade, Peter A. R. ORCID: https://orcid.org/0000-0002-5127-0401, Sudiwala, Rashmikant ORCID: https://orcid.org/0000-0003-3240-5304, Greenhouse, Matt, Moseley, Harvey and Stewart, Ken 1998. Nanotechnology fabrication of polysilicon film/metal grid infrared filters. Presented at: Laboratory Space Science Workshop, Cambridge, MA, USA, 1-3 April 1998.

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Item Type:	Conference or Workshop Item (Paper)
Date Type:	Completion
Status:	Unpublished
Schools:	Physics and Astronomy
Subjects:	Q Science > QB Astronomy
Last Modified:	27 Oct 2022 09:13
URI:	https://orca.cardiff.ac.uk/id/eprint/64823

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