Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates

Elgaid, Khaled ORCID: https://orcid.org/0000-0003-3265-1097, McCloy, David A. and Thayne, Iain G. 2003. Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates. Microelectronic Engineering 67-68 , pp. 417-421. 10.1016/S0167-9317(03)00188-6

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Publisher:	Elsevier
ISSN:	0167-9317
Last Modified:	23 Oct 2022 13:03
URI:	https://orca.cardiff.ac.uk/id/eprint/109546

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