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Epitaxial growth of GaSb on V-grooved Si (001) substrates with an ultrathin GaAs stress relaxing layer

Li, Qiang ORCID:, Lai, Billy and Lau, Kei May 2017. Epitaxial growth of GaSb on V-grooved Si (001) substrates with an ultrathin GaAs stress relaxing layer. Applied Physics Letters 111 (17) , 172103. 10.1063/1.5000100

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We report epitaxial growth of GaSb nano-ridge structures and planar thin films on V-groove patterned Si (001) substrates by leveraging the aspect ratio trapping technique. GaSb was deposited on {111} Si facets of the V-shaped trenches using metal-organic chemical vapor deposition with a 7 nm GaAs growth initiation layer. Transmission electron microscopy analysis reveals the critical role of the GaAs layer in providing a U-shaped surface for subsequent GaSb epitaxy. A network of misfit dislocations was uncovered at the GaSb/GaAs hetero-interface. We studied the evolution of the lattice relaxation as the growth progresses from closely pitched GaSb ridges to coalesced thin films using x-ray diffraction. The omega rocking curve full-width-at-half-maximum of the resultant GaSb thin film is among the lowest values reported by molecular beam epitaxy, substantiating the effectiveness of the defect necking mechanism. These results thus present promising opportunities for the heterogeneous integration of devices based on 6.1A ° family compound semiconductors

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Publisher: AIP Publishing
ISSN: 0003-6951
Funders: the Innovation Technology Fund of Hong Kong
Date of First Compliant Deposit: 24 March 2018
Date of Acceptance: 15 October 2017
Last Modified: 05 May 2023 23:30

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