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High-performance 3D on-chip air-gap spiral inductor and its application to filter design

Hettak, K., Ross, T., Elgaid, K. ORCID:, Thayne, I. G., Wight, J. and Morin, G. A. 2012. High-performance 3D on-chip air-gap spiral inductor and its application to filter design. Presented at: Asia-Pacific Microwave Conference 2011, 5-8 December 2011. Asia-Pacific Microwave Conference 2011. IEEE, -.

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The air-gap three-dimensional symmetric inductor is developed by using an MMIC air bridge approach to realize a suspended inductor. The proposed inductor has a very high quality factor achieving a Q factor of about 30 for a 2.4 nH air-gap symmetric inductor. This paper also presents a miniature semi-lumped low-pass filter composed of a cascade of the proposed elevated low-loss lumped inductors and ultra-low impedance air gap thin film microstrip line (TFMS) sections. This results in a wide stopband up to a high frequency and, when combined with high quality factor suspended inductors, also gives a sharp roll-off at the cutoff frequency. The combined characteristics of these elements make for excellent low-pass filter performance. Finally, compact and harmonic suppression semi-lumped stubs based on a CPW/thin film microstrip combination using 3D on-chip air-core elevated symmetric inductors are proposed.

Item Type: Conference or Workshop Item (Paper)
Date Type: Published Online
Status: Published
Schools: Engineering
Publisher: IEEE
ISBN: 9781457720345
Last Modified: 04 Nov 2022 12:17

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