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Fabrication of on-wafer MMIC compatible integrated NiCr loads

Elgaid, K. ORCID:, Edgar, D.L., Ferguson, S.M., Beaumont, S.P. and Thayne, I.G. 2001. Fabrication of on-wafer MMIC compatible integrated NiCr loads. Microelectronic Engineering 57-58 , pp. 801-806. 10.1016/S0167-9317(01)00504-4

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In this work we report on a novel technique for the fabrication of integrated NiCr resistors on GaAs substrates which are compatible with monolithic millimetre-wave integrated circuits (MMMICs) using e-beam lithography. Integrated NiCr resistors are required extensively for broadband RF on-wafer calibration of a vector network analyser and passive and active microwave components realisation. These loads showed a flat frequency response across an ultra-broadband range from DC to 110 GHz. In order to demonstrate the validity of using these NiCr loads on GaAs for on-wafer calibration, active devices were measured after LRRM calibration using the GaAs NiCr loads and compared with measured data of the same devices after LRL calibration.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Elsevier
ISSN: 0167-9317
Last Modified: 04 Nov 2022 12:18

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