Al-Shibaany, Zeyad Yousif Abdoon, Penchev, Pavel, Hedley, John and Dimov, Stefan 2020. Laser micromachining of lithium niobate-based resonant sensors towards medical devices applications. Sensors 20 (8) , 2206. 10.3390/s20082206 |
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Abstract
This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.
Item Type: | Article |
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Date Type: | Publication |
Status: | Published |
Schools: | Engineering |
Publisher: | MDPI |
ISSN: | 1424-8220 |
Date of First Compliant Deposit: | 16 April 2020 |
Date of Acceptance: | 3 April 2020 |
Last Modified: | 07 May 2023 18:59 |
URI: | https://orca.cardiff.ac.uk/id/eprint/131050 |
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