Laser micromachining of lithium niobate-based resonant sensors towards medical devices applications

Al-Shibaany, Zeyad Yousif Abdoon, Penchev, Pavel, Hedley, John and Dimov, Stefan 2020. Laser micromachining of lithium niobate-based resonant sensors towards medical devices applications. Sensors 20 (8) , 2206. 10.3390/s20082206

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Abstract

This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Publisher:	MDPI
ISSN:	1424-8220
Date of First Compliant Deposit:	16 April 2020
Date of Acceptance:	3 April 2020
Last Modified:	07 May 2023 18:59
URI:	https://orca.cardiff.ac.uk/id/eprint/131050

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