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Recent development and futuristic applications of MEMS based piezoelectric microphones

Kumar, Ashish, Varghese, Arathy, Sharma, Anup, Prasad, Mahanth, Janyani, Vijay, Yadav, R.P. and Elgaid, Khaled ORCID: 2022. Recent development and futuristic applications of MEMS based piezoelectric microphones. Sensors and Actuators A: Physical 347 , 113887. 10.1016/j.sna.2022.113887

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This paper presents a comprehensive literature survey of MEMS based piezoelectric microphones along with the fabrication processes involved, application domains, and methodologies used for experimentations. Advantages and limitations of existing microphones are presented with the impact of process parameters during the thin film growth. This review identifies the issues faced by the microphone technologies spanning from the invention of microphones to the most recent state-of-the-art solutions implemented to overcome or address them. A detailed comparison of performance in terms of sensitivity and dynamic range is presented here that can be used to decide the piezoelectric material and process to be used to develop sensors based on the bandwidth requirement. Electrical and mechanical properties of different piezoelectric materials such as AlN, ZnO, quartz, PZT, PVDF, and other polymers that has great potential to be used as the sensing membrane in development and deployment of these microphones are presented along with the complications faced during the fabrication. Insights on the future of these sensors and emerging application domains are also discussed.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Elsevier
ISSN: 0924-4247
Date of First Compliant Deposit: 10 October 2022
Date of Acceptance: 16 September 2022
Last Modified: 06 Jan 2024 02:07

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