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Direct-write projection lithography of quantum dot micropillar single photon sources

Androvitsaneas, Petros ORCID:, Clark, Rachel N., Jordan, Matthew, Alvarez Perez, Miguel, Peach, Tomas, Thomas, Stuart, Shabbir, Saleem, Sobiesierski, Angela D., Trapalis, Aristotelis, Farrer, Ian A., Langbein, Wolfgang W. and Bennett, Anthony J. ORCID: 2023. Direct-write projection lithography of quantum dot micropillar single photon sources. Applied Physics Letters 123 , 094001. 10.1063/5.0155968

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We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility (0.941 ± 0.008) ⁠.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Advanced Research Computing @ Cardiff (ARCCA)
Publisher: American Institute of Physics
ISSN: 1077-3118
Funders: EPSRC
Date of First Compliant Deposit: 11 August 2023
Date of Acceptance: 10 August 2023
Last Modified: 21 Jun 2024 15:07

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