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Room temperature reactive sputtering deposition of titanium nitride with high sheet kinetic inductance

Li, Juliang, Barry, Peter S., Cecil, Thomas, Lisovenko, Marharyta, Yefremenko, Volodymyr, Wang, Gensheng, Kruhlov, Serhii, Karapetrov, Goran and Chang, Clarence 2026. Room temperature reactive sputtering deposition of titanium nitride with high sheet kinetic inductance. Physica B: Condensed Matter 739 , 418921. 10.1016/j.physb.2026.418921

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Item Type: Article
Date Type: Publication
Status: Published
Schools: Schools > Physics and Astronomy
Additional Information: Rights Retention Policy applied
Publisher: Elsevier BV
ISSN: 0921-4526
Date of First Compliant Deposit: 7 September 2026
Date of Acceptance: 6 June 2026
Last Modified: 07 Sep 2026 09:30
URI: https://orca.cardiff.ac.uk/id/eprint/187985

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