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Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements

Caroselli, Raffaele, Ponce-Alcántara, Salvador, Quilez, Francisco Prats, Sánchez, David Martín, Morán, Luis Torrijos, Barres, Amadeu Griol, Bellieres, Laurent, Bandarenka, Hanna ORCID: https://orcid.org/0000-0003-4254-8261, Girel, Kseniya, Bondarenko, Vitaly and García-Rupérez, Jaime 2017. Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements. Optics Express 25 (25) , pp. 31651-31659. 10.1364/OE.25.031651

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Abstract

A highly sensitive photonic sensor based on a porous silicon ring resonator was developed and experimentally characterized. The photonic sensing structure was fabricated by exploiting a porous silicon double layer, where the top layer of a low porosity was used to form photonic elements by e-beam lithography and the bottom layer of a high porosity was used to confine light in the vertical direction. The sensing performance of the ring resonator sensor based on porous silicon was compared for the different resonances within the analyzed wavelength range both for transverse-electric and transverse-magnetic polarizations. We determined that a sensitivity up to 439 nm/RIU for low refractive index changes can be achieved depending on the optical field distribution given by each resonance/polarization.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Schools > Physics and Astronomy
Publisher: Optica Publishing Group
ISSN: 1094-4087
Date of First Compliant Deposit: 31 July 2026
Date of Acceptance: 4 November 2017
Last Modified: 07 Sep 2026 21:55
URI: https://orca.cardiff.ac.uk/id/eprint/188566

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