Allford, C. P.  ORCID: https://orcid.org/0000-0002-3798-9014, Baker, J., Gillgrass, S., Peach, T., Hentschel, C., Shutts, S. ORCID: https://orcid.org/0000-0001-6751-7790 and Smowton, P. M. ORCID: https://orcid.org/0000-0002-9105-4842
2026.
All-electrical measurement of VCSEL lateral oxidation extent.
IEEE Journal of Selected Topics in Quantum Electronics
, pp. 1-9.
10.1109/jstqe.2026.3716588
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Abstract
We present a non-destructive, all-electrical method for extracting the lateral oxidation extent in oxide-confined vertical-cavity surface-emitting lasers (VCSELs) using wafer-scale pulsed I–V measurements of non-lasing test structures. A distributed series-resistance model partitions contact, DBR, and oxide contributions and is fit across arrays of circular and elliptical mesas to recover isotropic and anisotropic oxidation extents, respectively. On commercial 940 nm, 150 mm epitaxial wafers with circular oxide apertures, the method yields a wafer-level mean of 16.10 μm with a standard deviation of 0.45 μm, showing close agreement with measurements from IR reflectivity of mean and standard deviation of 15.97 and 0.44 μm, respectively. Extension of the model to account for anisotropic oxidation extents on 852 nm, 100 mm epitaxial wafers extracts major and minor oxidation extents with values for wafer-level mean and standard deviations of (14.81 ± 0.35) μm and (12.00 ± 0.37) μm, respectively, which are consistent with IR mapping and FIB–SEM cross-sections. The approach is compatible with standard wafer-scale electrical probestations and supports statistically meaningful wafer-scale assessment relevant to VCSEL manufacturing.
| Item Type: | Article |
|---|---|
| Date Type: | Published Online |
| Status: | In Press |
| Schools: | Schools > Physical, Chemical & Environmental Sciences Schools > Physics and Astronomy |
| Additional Information: | RRS policy applied |
| Publisher: | Institute of Electrical and Electronics Engineers |
| ISSN: | 1077-260X |
| Date of First Compliant Deposit: | 6 August 2026 |
| Last Modified: | 06 Aug 2026 09:00 |
| URI: | https://orca.cardiff.ac.uk/id/eprint/188701 |
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