Key technologies and applications of mechanical-chemical lapping assisted by atmospheric plasma magnetron homogenization modification

Hu, Xiaolong, Li, Wei, Liu, Jiaming, Huang, Qiancheng, Liu, Jiachen, Wu, Bin and Bhaduri, Debajyoti ORCID: https://orcid.org/0000-0002-8270-388X 2026. Key technologies and applications of mechanical-chemical lapping assisted by atmospheric plasma magnetron homogenization modification. Ceramics International 10.1016/j.ceramint.2026.09.528

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Abstract

Plasma-assisted mechanochemical machining technology has garnered significant attention in recent years. However, the energy distribution of a single-beam plasma jet is relatively concentrated; when used for surface modification of materials, the thickness of the modified layer is often uneven. This study theoretically analyzes the mechanism of magnetic field effects on plasma, designs a ring-shaped electromagnetic device, and investigates the mechanism of plasma magnetron homogenization. A plasma modification process with precisely controllable modification scale was established. After magnetron homogenization, the modified area expanded by 80% (φ 4.5 mm), with a modification depth of 200 nm and excellent consistency in the modification layer thickness. This technology was applied to the mechanochemical lapping of CaF2 optical components, and the processing efficiencies of three techniques were compared: mechanochemical lapping, plasma modification-assisted lapping, and plasma magnetron homogenization modification-assisted lapping. The material removal rate of plasma magnetron homogenization-assisted mechanochemical lapping reached 158 nm/min. The surface roughness Sa achieved was 0.89 nm from an initial Sa of 100 nm. This study provides a technical reference for accelerating the application of magnetron homogenized plasma in the field of ultra-precision machining.

Item Type:	Article
Date Type:	Published Online
Status:	In Press
Schools:	Schools > Engineering
Publisher:	Elsevier
ISSN:	0272-8842
Date of Acceptance:	29 September 2026
Last Modified:	12 Oct 2026 10:46
URI:	https://orca.cardiff.ac.uk/id/eprint/190137

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