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Process chain for serial manufacture of 3D micro- and nano-scale structures

Velkova, Valentina, Lalev, Georgi M., Hirshy, Hassan ORCID:, Omar, Fuad, Scholz, Steffen Gerhard, Minev, Ekaterin and Dimov, Stefan Simeonov 2011. Process chain for serial manufacture of 3D micro- and nano-scale structures. CIRP Journal of Manufacturing Science and Technology 4 (4) , pp. 340-346. 10.1016/j.cirpj.2011.03.005

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This paper presents a cost effective route for serial fabrication of 3D structures and the achievement of function and length scale integration (FLSI) in products. A complex 3D functional pattern was designed and then used to validate this route for serial manufacture of component that integrates micro and nano scale functional features. It employs a viable master-making process chain that integrates, innovatively compatible and at the same time complementary, structuring and replication technologies to fabricate Ni shims. The shims are then utilised for the hot embossing of structures incorporating different 2.5D and 3D length-scale features. The resulting 3D profiles at different stages of the process chain were investigated and the factors affecting its overall performance were analysed.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Subjects: T Technology > TJ Mechanical engineering and machinery
Uncontrolled Keywords: FIB milling; 3D patterning; Function integration; Length-scale integration; Process chain; Master making
Publisher: Elsevier
ISSN: 1755-5817
Last Modified: 21 Oct 2022 09:24

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