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Towards CNC automation in AFM probe-based nano machining

Brousseau, Emmanuel Bruno Jean Paul ORCID:, Arnal, Benoit, Thiery, Stephane, Nyiri, Eric, Gibaru, Olivier and Mayor, J. Rhett 2013. Towards CNC automation in AFM probe-based nano machining. Presented at: 8th International Conference on Manufacturing (ICOMM 2012), Victoria, Canada, 25-28 March 2013. Proceedings of the 8th International Conference on MicroManufacturing (ICOMM 2013). 8th International Conference on MicroManufacturing (ICOMM2013). International Conference on MicroManufacturing, pp. 499-506.

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This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed.

Item Type: Conference or Workshop Item (Paper)
Date Type: Publication
Status: Published
Schools: Engineering
Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Publisher: International Conference on MicroManufacturing
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Last Modified: 24 Oct 2022 10:49

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