David Anthony Barrow, Kostas Bouris, Nicola Harries, Tyrone Gwyn Jones, University College Cardiff Consultants Limited 2004. Method for the bulk machining of fluoropolymer substrates. WO2004044655A1. [Patent]. |
Abstract
A method for the selective bulk-machining of a fluorinated polymer substrate: the method comprises the steps of dry etching the substrate (1) using a reactive ion plasma (8). The method enables the precision machining of miniature articles, for example microfluidic devices.
Item Type: | Patent |
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Date Type: | Publication |
Status: | Published |
Schools: | Engineering |
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
Additional Information: | Linked Patent Numbers: WO2004044655; UK0226688.0 |
Last Modified: | 24 Oct 2022 11:28 |
URI: | https://orca.cardiff.ac.uk/id/eprint/48257 |
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