Method for the bulk machining of fluoropolymer substrates

David Anthony Barrow, Kostas Bouris, Nicola Harries, Tyrone Gwyn Jones, University College Cardiff Consultants Limited 2004. Method for the bulk machining of fluoropolymer substrates. WO2004044655A1. [Patent].

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Abstract

A method for the selective bulk-machining of a fluorinated polymer substrate: the method comprises the steps of dry etching the substrate (1) using a reactive ion plasma (8). The method enables the precision machining of miniature articles, for example microfluidic devices.

Item Type:	Patent
Date Type:	Publication
Status:	Published
Schools:	Engineering
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Additional Information:	Linked Patent Numbers: WO2004044655; UK0226688.0
Last Modified:	24 Oct 2022 11:28
URI:	https://orca.cardiff.ac.uk/id/eprint/48257

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