Velten, T., Ruf, H .H., Barrow, David Anthony ORCID: https://orcid.org/0000-0003-2096-7262, Lazarou, P., Jung, E., Malek, C.K., Richter, M., Kruckow, J. and Wackerle, M.
2005.
Packaging of bio-MEMS: strategies, technologies and applications.
IEEE Transactions on Integration and Packaging
28
(4)
, pp. 533-546.
10.1109/TADVP.2005.858427
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