Optimization of Bi2Te3 and Sb2Te3 thin films deposited by co-evaporation on polyimide for thermoelectric applications

Goncalves, L. M., Alpuim, P., Min, Gao ORCID: https://orcid.org/0000-0001-9591-5825, Rowe, David Michael, Couto, C. and Correia, J. H. 2008. Optimization of Bi2Te3 and Sb2Te3 thin films deposited by co-evaporation on polyimide for thermoelectric applications. Vacuum 82 (12) , pp. 1499-1502. 10.1016/j.vacuum.2008.03.076

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Abstract

The optimization of the deposition process of n-type Bismuth Telluride and p-type Antimony Telluride thin films for thermoelectric applications is reported. The films were deposited on a 25 μm-thick flexible polyimide (kapton) substrate by co-evaporation of Bi and Te, for the n-type element, and Sb and Te, for the p-type element. The evaporation rate of each material was monitorized by an oscillating crystal sensor and the power supplied to each evaporation boat was controlled with a PID algorithm in order to achieve a precise user-defined constant evaporation rate. The influence of substrate temperature (in the range 240–300 °C) and evaporation rates of Bi, Te and Sb on the electronic properties of the films was studied and optimized to obtain the highest Seebeck coefficient. The best n-type Bi2Te3 films were deposited at 300 °C with a polycrystalline structure, a composition close to stoichiometry, electrical resistivity ∼20 μΩ m and Seebeck coefficient −195 μV/°C. The best p-type Sb2Te3 films were deposited at 240 °C, are slightly Te-rich, have electrical resistivity ∼20 μΩ m and Seebeck coefficient +153 μV/°C. These high Seebeck coefficients and low electrical resistivities make these materials suitable for fabrication of Peltier coolers and thermopile devices.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Uncontrolled Keywords:	Thin film Peltier; Thermoelectric; Microcooler; Thermopile
Publisher:	Elsevier
ISSN:	0042-207X
Last Modified:	17 Oct 2022 10:20
URI:	https://orca.cardiff.ac.uk/id/eprint/7758

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