Leng, X., Pereiro, J. ![]() |
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Official URL: https://doi.org/10.1063/1.4930214
Abstract
We have grown epitaxial WO3 films on various single-crystal substrates using radio frequency magnetron sputtering. While pronounced surface roughness is observed in films grown on LaSrAlO4 substrates, films grown on Y AlO3 substrates show atomically flat surfaces, as demonstrated by atomic force microscopy and X-ray diffraction (XRD) measurements. The crystalline structure has been confirmed to be monoclinic by symmetric and skew-symmetric XRD. The dependence of the growth modes and the surface morphology on the lattice mismatch are discussed.
Item Type: | Article |
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Date Type: | Publication |
Status: | Published |
Schools: | Physics and Astronomy |
Subjects: | Q Science > QC Physics |
Uncontrolled Keywords: | Epitaxy; Surface morphology; Thin film growth; X-ray diffraction; Crystal structure |
Publisher: | AIP Publishing |
ISSN: | 2166-532X |
Funders: | Department of Energy, USA |
Date of First Compliant Deposit: | 22 September 2016 |
Date of Acceptance: | 25 August 2015 |
Last Modified: | 04 May 2023 21:53 |
URI: | https://orca.cardiff.ac.uk/id/eprint/94207 |
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