Design and characterisation of titanium nitride subarrays of kinetic inductance detectors for passive terahertz imaging

Morozov, Dmitry, Doyle, Simon ORCID: https://orcid.org/0000-0002-9054-986X, Banerjee, Archan, Brien, Thomas, Hemakumara, Dilini, Thayne, Iain, Wood, Ken and Hadfield, Robert 2018. Design and characterisation of titanium nitride subarrays of kinetic inductance detectors for passive terahertz imaging. Journal of Low Temperature Physics 193 (3-4) , pp. 196-202. 10.1007/s10909-018-2023-z

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Abstract

We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature Tc, sheet resistance Rs and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power NEP_opt ≈ 2.3 × 10−15 W/√Hz, which is promising for passive terahertz imaging applications.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Subjects:	Q Science > QB Astronomy Q Science > QC Physics
Publisher:	Springer US
ISSN:	1573-7357
Funders:	EPSRC (EP/M01326X/1), European Research Council (IRIS 648604)
Date of First Compliant Deposit:	24 July 2018
Date of Acceptance:	3 July 2018
Last Modified:	24 May 2023 16:43
URI:	https://orca.cardiff.ac.uk/id/eprint/113370

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