Effect of target frequency, bias voltage and bias frequency on microstructure and mechanical properties of pulsed DC CFUBM sputtered TiN coating

Bhaduri, Debajyoti ORCID: https://orcid.org/0000-0002-8270-388X, Ghosh, A., Gangopadhyay, S. and Paul, S. 2010. Effect of target frequency, bias voltage and bias frequency on microstructure and mechanical properties of pulsed DC CFUBM sputtered TiN coating. Surface and Coatings Technology 204 , pp. 3684-3697. 10.1016/j.surfcoat.2010.04.047

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Publisher:	Elsevier
ISSN:	0257-8972
Date of Acceptance:	2010
Last Modified:	24 Oct 2022 07:09
URI:	https://orca.cardiff.ac.uk/id/eprint/114216

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