Shearrow, Abigail, Koolstra, Gerwin, Whiteley, Samuel J., Earnest, Nathan, Barry, Peter S., Heremans, F. Joseph, Awschalom, David D., Shirokoff, Erik and Schuster, David I. 2018. Atomic layer deposition of titanium nitride for quantum circuits. Applied Physics Letters 113 (21) 10.1063/1.5053461 |
Official URL: http://dx.doi.org/10.1063/1.5053461
Item Type: | Article |
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Date Type: | Published Online |
Status: | Published |
Schools: | Physics and Astronomy |
Publisher: | American Institute of Physics |
ISSN: | 0003-6951 |
Date of Acceptance: | 2 October 2018 |
Last Modified: | 15 May 2023 09:30 |
URI: | https://orca.cardiff.ac.uk/id/eprint/155709 |
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