Direct-write projection lithography of quantum dot micropillar single photon sources

Androvitsaneas, Petros ORCID: https://orcid.org/0000-0001-5013-0282, Clark, Rachel, Jordan, Matthew, Peach, Tomas, Thomas, Stuart, Shabbir, Saleem, Sobiesierski, Angela, Trapalis, Aristotelis, Farrer, Ian, Langbein, Wolfgang ORCID: https://orcid.org/0000-0001-9786-1023 and Bennett, Anthony ORCID: https://orcid.org/0000-0002-5386-3710 2023. Direct-write projection lithography of quantum dot micropillar single photon sources. [Online]. arXiv. Available at: https://doi.org/10.48550/arXiv.2304.00141

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Abstract

We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve high volume patterning of high aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high purity indistinguishable single photons with interference visibility (96.2 ± 0.7)%.

Item Type:	Website Content
Date Type:	Submission
Status:	Submitted
Schools:	Engineering Physics and Astronomy
Subjects:	Q Science > QC Physics
Publisher:	arXiv
Funders:	EPSRC
Last Modified:	29 Jun 2024 11:09
URI:	https://orca.cardiff.ac.uk/id/eprint/158273

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