Variability in Measurements of Micro Lengths with a White Light Interferometer

Ferri, C. and Brousseau, Emmanuel Bruno Jean Paul ORCID: https://orcid.org/0000-0003-2728-3189 2008. Variability in Measurements of Micro Lengths with a White Light Interferometer. Quality and Reliability Engineering International 24 (8) , pp. 881-890. 10.1002/qre.903

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Abstract

The effect of the discretionary set-up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 lm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Uncontrolled Keywords:	random effects ANOVA; linear mixed models; white light interferometry; WLI; uncertainty; gauge capability analysis
Additional Information:	Special Issue -6th International Conference on Quality, Reliability and Maintenance (QRM), St Edmund Hall, Oxford
Publisher:	Wiley-Blackwell
ISSN:	1099-1638
Last Modified:	18 Oct 2022 14:08
URI:	https://orca.cardiff.ac.uk/id/eprint/16581

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