Patterning of nanomembranes with a focused-ion-beam

Matovic, J., Kettle, J., Brousseau, Emmanuel Bruno Jean Paul ORCID: https://orcid.org/0000-0003-2728-3189 and Adamovic, N. 2008. Patterning of nanomembranes with a focused-ion-beam. Presented at: 26th International Conference on Microelectronics( MIEL 2008), Nis, Serbia, pp. 103-106.

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Item Type:	Conference or Workshop Item (Paper)
Schools:	Schools > Engineering Research Institutes & Centres > Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Last Modified:	18 Oct 2022 14:12
URI:	https://orca.cardiff.ac.uk/id/eprint/16795

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