Formation of nano-pores in nano-crystalline diamond films

Kriele, Armin, Williams, Oliver Aneurin ORCID: https://orcid.org/0000-0002-7210-3004, Wolfer, Marco, Hees, Jakob J., Smirnov, Waldemar and Nebel, Christoph E. 2011. Formation of nano-pores in nano-crystalline diamond films. Chemical Physics Letters 507 (4-6) , pp. 253-259. 10.1016/j.cplett.2011.03.089

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Abstract

Various nano-pores in nano-crystalline diamond (NCD) thin films have been fabricated and characterized. Therefore in this work two aspects of NCD thin films synthesized by microwave assisted chemical-vapour-deposition (MWCVD) have been investigated. Firstly, the influence of CVD-growth conditions on the film morphology and chemical grain boundary composition and their impact on the mechanical properties. Second, the formation of nano-pores by selective etching of the non-diamond phase. Freestanding NCD membranes were fabricated and bulged to calculate the Young’s modulus which can reach surprisingly high values (1100 GPa) close to single crystal diamond. The presence of nano-pores was verified by electrochemical experiments where ions have been used to detect the porosity.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Subjects:	Q Science > QC Physics
Publisher:	Elsevier
ISSN:	0009-2614
Last Modified:	18 Oct 2022 14:34
URI:	https://orca.cardiff.ac.uk/id/eprint/18036

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