Enhanced boron doping for diamond growth in cylindrical CVD reactors using a Faraday cage

Jiang, Y., Bose, M., Cuenca, J. A. ORCID: https://orcid.org/0000-0003-1370-1167, Creedon, D. L., Belcourt, J., van Engers, C. D., Nadarajah, A., Ganesan, K., McCallum, J. C., Fox, K., Prawer, S., Jamieson, D. N. and Stacey, A. 2025. Enhanced boron doping for diamond growth in cylindrical CVD reactors using a Faraday cage. Diamond and Related Materials 160 , 113009. 10.1016/j.diamond.2025.113009

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Abstract

We report on the use of 3D-printed titanium Faraday cages in a cylindrical resonant cavity CVD reactor for the growth of heavily boron-doped single-crystalline superconducting diamond. We show that the cage enhances boron doping uniformity and provides control of the doping efficiency and growth rate by varying the distance between the plasma and the diamond surface. Using finite element modelling, we demonstrate that the Faraday cage focuses the electric field at the top of the cage whilst also suppressing the electric field inside the cage, thereby pinning the plasma at a fixed height above the sample. This eliminates plasma “hot spots” at the edges of the sample and creates a more uniform plasma electron and hydrogen radical distribution over the sample, resulting in a more uniform boron incorporation.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Schools > Physics and Astronomy
Additional Information:	License information from Publisher: LICENSE 1: URL: http://creativecommons.org/licenses/by/4.0/, Start Date: 2025-11-05
Publisher:	Elsevier
ISSN:	0925-9635
Date of First Compliant Deposit:	13 November 2025
Date of Acceptance:	25 October 2025
Last Modified:	13 Nov 2025 10:30
URI:	https://orca.cardiff.ac.uk/id/eprint/182387

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