16×1 linear vacuum ultraviolet photodetector array based on hexagonal boron nitride film

Fang, Wannian, Li, Qiang, Chen, Youwei, Liu, Haifeng, Li, Jiaxing, Lin, Ziyan, Zhou, Xinze, Liu, Ao, Yun, Feng and Wang, Tao 2025. 16×1 linear vacuum ultraviolet photodetector array based on hexagonal boron nitride film. Photonics 12 (12) , 1216. 10.3390/photonics12121216

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Abstract

Hexagonal boron nitride (hBN) is a promising material for vacuum ultraviolet (VUV) photodetection, owing to its ultra-wide bandgap and cost-effective synthesis. In this work, 2-inch high-quality hBN films were successfully deposited by magnetron sputtering, and 16×1 linear photodetector arrays were fabricated using a patterned electrode process. The fabricated devices exhibit excellent uniformity, achieving a dark current below 2 pA, a responsivity of 2.665 mA/W, a specific detectivity of 4.831 × 109 Jones, and rise/decay times of 91.31 and 147.25 ms, respectively. Furthermore, clear VUV images were obtained by using the photodetector array as the imaging unit of the imaging system. These results provide a convenient way to construct high-performance linear VUV photodetector arrays based on hBN films, and thus may push forward their future applications.

Item Type:	Article
Date Type:	Published Online
Status:	Published
Schools:	Schools > Physics and Astronomy
Additional Information:	License information from Publisher: LICENSE 1: URL: https://creativecommons.org/licenses/by/4.0/, Start Date: 2025-12-09
Publisher:	MDPI
Date of First Compliant Deposit:	18 December 2025
Date of Acceptance:	7 December 2025
Last Modified:	18 Dec 2025 17:00
URI:	https://orca.cardiff.ac.uk/id/eprint/183375

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