Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

Krohs, F., Luttermann, T., Stolle, C., Fatikow, S., Brousseau, Emmanuel Bruno Jean Paul ORCID: https://orcid.org/0000-0003-2728-3189 and Dimov, Stefan Simeonov 2008. Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring. Presented at: International Conference on Multi-Material Micro Manufacture, Cardiff, UK, 9-11 September 2008. Published in: Menz, Wolfgang and Dimov, Stefan Simeonov eds. 4M 2008: Fourth International Conference on Multi-Material Micro Manufacture, 9th-11th September 2008, Cardiff, Wales. Dunbeath: Whittles, pp. 118-123.

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Item Type:	Conference or Workshop Item (Paper)
Status:	Published
Schools:	Schools > Engineering Research Institutes & Centres > Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Publisher:	Whittles
ISBN:	9781904445760
Last Modified:	19 Oct 2022 09:24
URI:	https://orca.cardiff.ac.uk/id/eprint/21021

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