Low cost PMMA based photo-masks for 3D grey scale micro-structuring application

Lewis, S., Wheeler-Jones, R., Perks, Richard Marc ORCID: https://orcid.org/0000-0003-0873-0537 and Haynes, V. 2006. Low cost PMMA based photo-masks for 3D grey scale micro-structuring application. Presented at: Technical Proceedings 2006 Nanotechnology Conference & Trade Show, Boston, USA, , vol.3 pp. 214-217.

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Item Type:	Conference or Workshop Item (Paper)
Schools:	Engineering
Last Modified:	19 Oct 2022 09:25
URI:	https://orca.cardiff.ac.uk/id/eprint/21082

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