Nanocrystalline diamond-based field-effect capacitive pH sensor

Christiaens, P., Abouzar, M. H., Poghossian, A., Wagner, T., Bijnens, N., Williams, Oliver Aneurin ORCID: https://orcid.org/0000-0002-7210-3004, Daenen, M., Haenen, K., Schoning, M. J. and Wagner, P. 2007. Nanocrystalline diamond-based field-effect capacitive pH sensor. Presented at: TRANSDUCERS '07 & EUROSENSORS XXI: International Solid-State Sensors, Actuators and Microsystems Conference 2007, Lyon, France, 10-14 June 2007. Proceedings: TRANSDUCERS 2007: International Solid-State Sensors, Actuators and Microsystems Conference 2007. Los Alamitos, CA: IEEE, pp. 1891-1894. 10.1109/SENSOR.2007.4300527

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Abstract

The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator- semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on p-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance- voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.

Item Type:	Conference or Workshop Item (Paper)
Date Type:	Publication
Status:	Published
Schools:	Schools > Physics and Astronomy
Subjects:	Q Science > QC Physics
Publisher:	IEEE
ISBN:	1424408423
Last Modified:	21 Oct 2022 08:43
URI:	https://orca.cardiff.ac.uk/id/eprint/34170

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