Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Hees, J., Heidrich, N., Pletschen, W., Sah, R. E., Wolfer, M., Williams, Oliver Aneurin ORCID: https://orcid.org/0000-0002-7210-3004, Lebedev, V., Nebel, C. E. and Ambacher, O. 2013. Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films. Nanotechnology 24 (2) , 025601. 10.1088/0957-4484/24/2/025601

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Abstract

Unimorph heterostructures based on piezoelectric aluminum nitride (AlN) and diamond thin films are highly desirable for applications in micro- and nanoelectromechanical systems. In this paper, we present a new approach to combine thin conductive boron-doped as well as insulating nanocrystalline diamond (NCD) with sputtered AlN films without the need for any buffer layers between AlN and NCD or polishing steps. The zeta potentials of differently treated nanodiamond (ND) particles in aqueous colloids are adjusted to the zeta potential of AlN in water. Thereby, the nucleation density for the initial growth of diamond on AlN can be varied from very low (108 cm−2), in the case of hydrogen-treated ND seeding particles, to very high values of 1011 cm−2 for oxidized ND particles. Our approach yielding high nucleation densities allows the growth of very thin NCD films on AlN with thicknesses as low as 40 nm for applications such as microelectromechanical beam resonators. Fabricated piezo-actuated micro-resonators exhibit enhanced mechanical properties due to the incorporation of boron-doped NCD films. Highly boron-doped NCD thin films which replace the metal top electrode offer Young's moduli of more than 1000 GPa.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Subjects:	Q Science > QC Physics
Uncontrolled Keywords:	Soft matter, liquids and polymers; Electronics and devices; Condensed matter: electrical, magnetic and optical; surfaces, interfaces and thin films; Nanoscale science and low-D systems; Chemical physics and physical chemistry
Publisher:	IOP Publishing
ISSN:	0957-4484
Funders:	EPSRC
Last Modified:	25 Oct 2022 08:20
URI:	https://orca.cardiff.ac.uk/id/eprint/52422

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