Calibration of a white light interferometer for the measurement of micro-scale dimensions

Ferri, C., Faraway, J. and Brousseau, Emmanuel Bruno Jean Paul ORCID: https://orcid.org/0000-0003-2728-3189 2010. Calibration of a white light interferometer for the measurement of micro-scale dimensions. International Journal of Advanced Manufacturing Technology 47 (1-4) , pp. 125-135. 10.1007/s00170-009-2050-7

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Publisher:	Springer Verlag
ISSN:	0268-3768
Funders:	EPSRC
Last Modified:	17 Oct 2022 10:20
URI:	https://orca.cardiff.ac.uk/id/eprint/7735

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