Fabrication of complex 3D structures using step and flash imprint lithography (S-FIL)

Kettle, J, Hoyle, R. T., Dimov, Stefan Simeonov and Perks, Richard Marc ORCID: https://orcid.org/0000-0003-0873-0537 2008. Fabrication of complex 3D structures using step and flash imprint lithography (S-FIL). Microelectronic Engineering 85 (5-6) , pp. 853-855. 10.1016/j.mee.2007.12.003

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Item Type:	Article
Schools:	Schools > Engineering
ISSN:	0167-9317
Last Modified:	17 Oct 2022 10:23
URI:	https://orca.cardiff.ac.uk/id/eprint/7885

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