Overcoming material challenges for replication of 'Motheye Lenses' using Step and Flash Imprint Lithography for optoelectronic applications

Kettle, J., Hoyle, R. T., Perks, Richard Marc ORCID: https://orcid.org/0000-0003-0873-0537 and Dimov, Stefan Simeonov 2008. Overcoming material challenges for replication of 'Motheye Lenses' using Step and Flash Imprint Lithography for optoelectronic applications. Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics 26 (5) , pp. 1794-1799. 10.1116/1.2981081

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Engineering
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Publisher:	American Institute of Physics
ISSN:	1071-1023
Last Modified:	17 Oct 2022 10:23
URI:	https://orca.cardiff.ac.uk/id/eprint/7886

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