Heyn, Christian, Schnüll, Sandra, Jesson, David E.  ORCID: https://orcid.org/0000-0003-0897-1445 and Hansen, Wolfgang
2014.
Thermally controlled widening of droplet etched nanoholes.
Nanoscale Research Letters
9
(1)
, 285.
10.1186/1556-276X-9-285
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Abstract
We describe a method to control the shape of nanoholes in GaAs (001) which combines the technique of local droplet etching using Ga droplets with long-time thermal annealing. The cone-like shape of inverted nanoholes formed by droplet etching is transformed during long-time annealing into widened holes with flat bottoms and reduced depth. This is qualitatively understood using a simplified model of mass transport incorporating surface diffusion and evaporation. The hole diameter can be thermally controlled by varying the annealing time or annealing temperature which provides a method for tuning template morphology for subsequent nanostructure nucleation. We also demonstrate the integration of the combined droplet/thermal etching process with heteroepitaxy by the thermal control of hole depth in AlGaAs layers.
| Item Type: | Article |
|---|---|
| Date Type: | Published Online |
| Status: | Published |
| Schools: | Schools > Physics and Astronomy |
| Subjects: | Q Science > QC Physics |
| Publisher: | Springer |
| ISSN: | 1556-276X |
| Funders: | EU |
| Date of First Compliant Deposit: | 21 April 2016 |
| Date of Acceptance: | 27 May 2014 |
| Last Modified: | 04 May 2023 20:40 |
| URI: | https://orca.cardiff.ac.uk/id/eprint/89545 |
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