Thermally controlled widening of droplet etched nanoholes

Heyn, Christian, Schnüll, Sandra, Jesson, David E. ORCID: https://orcid.org/0000-0003-0897-1445 and Hansen, Wolfgang 2014. Thermally controlled widening of droplet etched nanoholes. Nanoscale Research Letters 9 (1) , 285. 10.1186/1556-276X-9-285

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Abstract

We describe a method to control the shape of nanoholes in GaAs (001) which combines the technique of local droplet etching using Ga droplets with long-time thermal annealing. The cone-like shape of inverted nanoholes formed by droplet etching is transformed during long-time annealing into widened holes with flat bottoms and reduced depth. This is qualitatively understood using a simplified model of mass transport incorporating surface diffusion and evaporation. The hole diameter can be thermally controlled by varying the annealing time or annealing temperature which provides a method for tuning template morphology for subsequent nanostructure nucleation. We also demonstrate the integration of the combined droplet/thermal etching process with heteroepitaxy by the thermal control of hole depth in AlGaAs layers.

Item Type:	Article
Date Type:	Published Online
Status:	Published
Schools:	Physics and Astronomy
Subjects:	Q Science > QC Physics
Publisher:	Springer
ISSN:	1556-276X
Funders:	EU
Date of First Compliant Deposit:	21 April 2016
Date of Acceptance:	27 May 2014
Last Modified:	04 May 2023 20:40
URI:	https://orca.cardiff.ac.uk/id/eprint/89545

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