Liu, Renjun, Kant, Chandra, Othman, Diyar Mousa, Macdonald, David, Erkizan, Serena Nur, Solari, William, Ji, Hong, Ludtke, Ingo, Ming, Wenlong ORCID: https://orcid.org/0000-0003-1780-7292 and Hou, Bo ORCID: https://orcid.org/0000-0001-9918-8223 2024. Sputtering grown wide band gap AlN thin films for high power capacitors. Presented at: Workshop on Wide Bandgap Power Devices and Applications in Europe (WiPDA Europe), Cardiff, UK, 16-18 September 2024. Proceedings of IEEE Workshop on Wide Bandgap Power Devices and Applications in Europe. IEEE, pp. 1-3. 10.1109/WiPDAEurope62087.2024.10797419 |