Fabrication of high-aspect-ratio, sub-micron gratings in AlGaInP/GaAs laser structures using a BCl3/Cl-2/Ar inductively coupled plasma

Edwards, Gareth, Sobiesierski, Angela, Westwood, David and Smowton, Peter ORCID: https://orcid.org/0000-0002-9105-4842 2007. Fabrication of high-aspect-ratio, sub-micron gratings in AlGaInP/GaAs laser structures using a BCl3/Cl-2/Ar inductively coupled plasma. Semiconductor Science and Technology 22 (9) , pp. 1010-1015. 10.1088/0268-1242/22/9/006

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Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Schools > Physics and Astronomy
Subjects:	Q Science > QC Physics
Uncontrolled Keywords:	Surfaces ; Interfaces and thin films ; Optics ; Quantum optics and lasers ; Plasma physics ; Nanoscale science and low-D systems
Publisher:	Institute of Physics
ISSN:	0268-1242
Last Modified:	18 Oct 2022 12:47
URI:	https://orca.cardiff.ac.uk/id/eprint/11261

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