Configurations of laser interference lithography for 2D/3D nanostructures of optical functional materials

Zhang, Jin, Ji, Ze ORCID: https://orcid.org/0000-0002-8968-9902, Jiang, Shilei, Liang, Haisheng, Sun, Huan, Wang, Zuobin and Tan, Chunlei 2012. Configurations of laser interference lithography for 2D/3D nanostructures of optical functional materials. Presented at: 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Shaanxi, China, 29 August - 1st September 2012. 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). p. 169. 10.1109/3M-NANO.2012.6472999

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Item Type:	Conference or Workshop Item (Paper)
Date Type:	Publication
Status:	Published
Schools:	Schools > Engineering
Last Modified:	23 Oct 2022 14:08
URI:	https://orca.cardiff.ac.uk/id/eprint/112857

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