Design and commissioning of a UHV sputter system for the fabrication of superconducting TiN KID’s using High Power Impulse Magnetron Sputtering

Woodhead, Christopher ORCID: https://orcid.org/0000-0003-1342-0744, Becerril Tapia, Marcial, Dunscombe, Christopher, Brien, Thomas, Baghoria, Mayank, Doyle, Simon ORCID: https://orcid.org/0000-0002-9054-986X and Hargrave, Peter ORCID: https://orcid.org/0000-0002-3109-6629 2024. Design and commissioning of a UHV sputter system for the fabrication of superconducting TiN KID’s using High Power Impulse Magnetron Sputtering. Presented at: SPIE Astronomical Telescopes + Instrumentation 2024, Yokohama, Japan, 16 - 21 June 2024. Published in: Zmuidzinas, Jonas and Gao, Jian-Rong eds. Proceedings Volume PC13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII. SPIE, 10.1117/12.3019852

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Abstract

Titanium nitride (TiN) is an ideal material for fabricating Kinetic Inductance Detectors (KIDs), firstly due to its relatively high and tuneable critical temperature, and secondly its high normal-state resistivity, which allows for a large kinetic inductance and responsivity. However, fabricating large arrays on wafers greater than 150 mm can be challenging due to TiN films being very sensitive to changes in stoichiometry, thickness and contaminants. In this paper we demonstrate a novel technique for making high quality films of superconducting TiN via the use of a high impulse magnetron sputtering technique (HIPIMs) in conjunction with a custom built ultra-high vacuum environment. We detail the design principles of the UHV-HIPIMS sputter system and show that films of high uniformity suitable for use in KID arrays can be achieved.

Item Type:	Conference or Workshop Item (Paper)
Date Type:	Published Online
Status:	Published
Schools:	Physics and Astronomy
Subjects:	Q Science > QC Physics
Publisher:	SPIE
Funders:	UKRI
Date of First Compliant Deposit:	10 September 2024
Date of Acceptance:	10 September 2024
Last Modified:	17 Nov 2024 02:45
URI:	https://orca.cardiff.ac.uk/id/eprint/171994

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