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Woodhead, Christopher ORCID: https://orcid.org/0000-0003-1342-0744, Becerril Tapia, Marcial, Dunscombe, Christopher, Brien, Thomas, Baghoria, Mayank, Doyle, Simon ORCID: https://orcid.org/0000-0002-9054-986X and Hargrave, Peter ORCID: https://orcid.org/0000-0002-3109-6629 2024. Design and commissioning of a UHV sputter system for the fabrication of superconducting TiN KID’s using High Power Impulse Magnetron Sputtering. Presented at: SPIE Astronomical Telescopes + Instrumentation 2024, Yokohama, Japan, 16 - 21 June 2024. Published in: Zmuidzinas, Jonas and Gao, Jian-Rong eds. Proceedings Volume PC13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII. SPIE, 10.1117/12.3019852
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