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Fully-vertical GaN-on-SiC Trench MOSFETs

Li, Jialun, Zhu, Renqiang, Wong, Ka ORCID: https://orcid.org/0000-0003-3770-1380 and May Lau, Kei 2025. Fully-vertical GaN-on-SiC Trench MOSFETs. IEEE Electron Device Letters 46 (2) , pp. 282-285. 10.1109/LED.2024.3520200

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Abstract

This letter presents the first demonstration of fully-vertical GaN-on-SiC trench MOSFETs enabled by a conductive AlGaN buffer. Good ON-state device performance including a maximum drain current density of 2.43 kA/cm2 and a high threshold voltage of 5 V has been demonstrated. The relatively high specific ON-resistance at low VDS is a result of a knee voltage induced by the yet to be optimized AlGaN/SiC heterojunction. A breakdown voltage of 334 V has been measured. Compared with quasi-vertical GaN-on-silicon trench MOSFETs, less current crowding effect is observed for fully-vertical GaN-on-SiC trench MOSFETs, as well as a better performance at elevated temperatures.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Schools > Physics and Astronomy
Publisher: Institute of Electrical and Electronics Engineers
ISSN: 0741-3106
Date of First Compliant Deposit: 14 March 2025
Date of Acceptance: 16 December 2024
Last Modified: 17 Mar 2025 11:15
URI: https://orca.cardiff.ac.uk/id/eprint/176899

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