AlN-on-sapphire microdisk resonators for precise on-chip temperature sensing

Armstrong, D.O., Cannon, J.K., Kiely, O., Ibrahim, S., Yağcı, H.B. ORCID: https://orcid.org/0000-0002-8992-2292, Peach, T., Wong, P. ORCID: https://orcid.org/0000-0003-3770-1380, Hadden, J.P. ORCID: https://orcid.org/0000-0001-5407-6754 and Bennett, A.J. ORCID: https://orcid.org/0000-0002-5386-3710 2026. AlN-on-sapphire microdisk resonators for precise on-chip temperature sensing. Journal of Applied Physics 139 (7) , 073104. 10.1063/5.0313161

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Abstract

Photonic integrated circuit sensors can be used for precise sensing of the environment, offering the advantage of integration with fiber networks for remote and multiplexed sensor arrays. In this work, we examine the performance of aluminum nitride on sapphire microdisk mode resonators in an all-pass configuration. We discuss their potential as on-chip temperature sensors under fixed-frequency and frequency-scanning modes, demonstrating the latter can measure a 1 K temperature change with an uncertainty of 5.1 mK over a temperature range of 25–55 C.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Schools > Engineering Research Institutes & Centres > Institute for Compound Semiconductors (ICS)
Publisher:	American Institute of Physics
ISSN:	1089-7550
Date of First Compliant Deposit:	3 February 2026
Date of Acceptance:	31 January 2026
Last Modified:	06 Mar 2026 10:46
URI:	https://orca.cardiff.ac.uk/id/eprint/184375

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