Koh, Donghyi, Shin, Seung Heon, Ahn, Jaehyun, Sonde, Sushant, Kwon, Hyuk-Min, Orzali, Tommaso  ORCID: https://orcid.org/0000-0001-9446-5789, Kim, Dae-Hyun, Kim, Tae-Woo and Banerjee, Sanjay K.
2015.
Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metaloxide-semiconductor device.
Applied Physics Letters
107
(18)
, 183509-1-183509-3.
10.1063/1.4935248
|
Official URL: http://scitation.aip.org/content/aip/journal/apl/1...
| Item Type: | Article |
|---|---|
| Date Type: | Publication |
| Status: | Published |
| Schools: | Schools > Physics and Astronomy |
| Subjects: | Q Science > QC Physics |
| Publisher: | American Institute of Physics |
| ISSN: | 0003-6951 |
| Date of Acceptance: | 24 October 2015 |
| Last Modified: | 01 Nov 2022 11:15 |
| URI: | https://orca.cardiff.ac.uk/id/eprint/94345 |
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