Kennon, E. L., Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Xin, Y., Vert, A., Lind, A. G. and Jones, K. S.
2017.
Deactivation of electrically supersaturated Te-doped InGaAs grown by MOCVD.
Journal of Materials Science
52
(18)
, pp. 10879-10885.
10.1007/s10853-017-1254-8
|
|
|
Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Vert, Alexey, O'Brian, Brendan, Herman, Joshua L., Vivekanand, Saikumar, Papa Rao, Satyavolu S. and Oktyabrsky, Serge R.
2016.
Epitaxial growth of GaSb and InAs fins on 300 mm Si (001) by aspect ratio trapping.
Journal of Applied Physics
120
(8)
, 085308.
10.1063/1.4961522
|
|
|
Vert, Alexey, Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Satyavolu, PapaRao, Whitener, Glenn and Petro, Benjamin
2016.
Integration of InP and InGaAs on 300 mm Si wafers using chemical mechanical planarization.
ECS Journal of Solid State Science and Technology
5
(9)
, P478-P482.
10.1149/2.0101609jss
|
|
|
Koh, Donghyi, Shin, Seung Heon, Ahn, Jaehyun, Sonde, Sushant, Kwon, Hyuk-Min, Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Kim, Dae-Hyun, Kim, Tae-Woo and Banerjee, Sanjay K.
2015.
Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metaloxide-semiconductor device.
Applied Physics Letters
107
(18)
, 183509-1-183509-3.
10.1063/1.4935248
|
|
Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Vert, Alexey, Kim, Tae-Woo, Hung, P.Y., Herman, Joshua L., Vivekanand, Saikumar, Huang, Gensheng, Kelman, Max, Karim, Zia, Hill, Richard J.W. and Rao, Satyavolu S. Papa
2015.
Growth and characterization of an In0.53Ga0.47As-based Metal-Oxide-Semiconductor Capacitor (MOSCAP) structure on 300mm on-axis Si (001) wafers by MOCVD.
Journal of Crystal Growth
427
, pp. 72-79.
10.1016/j.jcrysgro.2015.07.013
|
|
Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Vert, Alexey, Lee, Rinus T.P., Norvilas, Aras, Huang, Gensheng, Herman, Joshua L., Hill, Richard J.W. and Rao, Satyavolu S. Papa
2015.
Heavily tellurium doped n-type InGaAs grown by MOCVD on 300 mm Si wafers.
Journal of Crystal Growth
426
, pp. 243-247.
10.1016/j.jcrysgro.2015.05.007
|
|
Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Vert, Alexey, O'Brien, Brendan, Herman, Joshua L., Vivekanand, Saikumar, Hill, Richard J. W., Karim, Zia and Papa Rao, Satyavolu S.
2015.
GaAs on Si epitaxy by aspect ratio trapping: analysis and reduction of defects propagating along the trench direction.
Journal of Applied Physics
118
(10)
, 105307.
10.1063/1.4930594
|
|
|
Loh, W.-Y., Lee, R. T.P., Tieckelmann, R., Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Sapp, B., Hobbs, C., Rao, S.S. Papa, Fuse, K., Sato, M., Fujiwara, N., Chang, L. and Uchida, H.
2015.
300mm wafer level sulfur monolayer doping for III–V materials.
Presented at: Advanced Semiconductor Manufacturing Conference (ASMC),
Saratoga Springs NY,
3-6 May 2015.
Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI.
New York:
Institute of Electrical and Electronics Engineers (IEEE),
pp. 451-454.
10.1109/ASMC.2015.7164438
|
|
Vert, Alexey, Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Dyer, Tom, Hill, Richard, Satyavolu, PapaRao, Barth, Edward, Gaylord, Richard, Hu, Shan, Vivekanand, Saikumar, Herman, Joshua, Rana, Uzma and Kaushik, Vidya
2015.
Backside and edge cleaning of III–V on Si wafers for contamination free manufacturing.
Presented at: Advanced Semiconductor Manufacturing Conference (ASMC),
Saratoga Springs, NY,
3-6 May 2015.
Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI.
New York:
Institute of Electrical and Electronics Engineers (IEEE),
pp. 362-366.
10.1109/ASMC.2015.7164420
|
|
Kim, Tae-Woo, Kwon, Hyuk-Min, Shin, Seung Heon, Shin, Chan-Soo, Park, Won-Kyu, Chiu, Eddie, Rivera, Manny, Lew, Jae Ik, Veksler, Dmitry, Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789 and Kim, Dae-Hyun
2015.
Impact of H2 high-pressure annealing onto InGaAs quantum-well metal–oxide–semiconductor field-effect transistors with Al2O3/HfO2 Gate-Stack.
IEEE Electron Device Letters
36
(7)
, pp. 672-674.
10.1109/LED.2015.2438433
|
|
Lee, R. T. P., Loh, W. Y., Tieckelmann, R., Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Huffman, C., Vert, A., Huang, G., Kelman, M., Karim, Z., Hobbs, C., Hill, R. J. W. and Papa Rao, S. S.
2015.
(Invited) Technology options to reduce contact resistance in Nanoscale III-V MOSFETs.
ECS Transactions
66
(4)
, pp. 125-134.
10.1149/06604.0125ecst
|
|
Kim, Tae-Woo, Koh, Dong-Hyi, Shin, Chan-Soo, Park, Won-Kyu, Orzali, Tommaso ORCID: https://orcid.org/0000-0001-9446-5789, Hobbs, Chris, Maszara, Witek P. and Kim, Dae-Hyun
2015.
L g=80 -nm trigate quantum-well In0.53Ga0.47As metal–oxide–semiconductor field-effect transistors with Al2O3/HfO2 gate-stack.
IEEE Electron Device Letters
36
(3)
, pp. 223-225.
10.1109/LED.2015.2393554
|
|



Up a level